Chip fabrication is a core link in the high-end manufacturing industry. Its precision processes require the production environment to maintain stable, high-standard clean conditions for a long time. As the basic core facility of chip factories, the Chip Cleanroom affects wafer production yield, stable equipment operation and the enterprise’s compliance production capacity, and is also a rigid requirement for the standardized construction of modern high-end manufacturing plants.
I. Cleanliness Level Specifications for the Chip Manufacturing Industry
Based on the internationally accepted ISO 14644-1 standard, the core production area of chip fabrication must stably maintain ISO Class 1–3 Chip Cleanroom standards. Key precision processes such as photolithography and etching need to meet higher-level dust-free control standards.
Chip components have a precise structure, and tiny suspended particles and conductive dust can cause irreversible damage: fine dust adhesion is likely to cause process defects, and conductive dust may trigger circuit short circuits and chip burnout, directly leading to the scrapping of batch products. Therefore, building a standardized Chip Cleanroom and implementing regular clean control are the basic prerequisites for the stable production of chip manufacturing enterprises.
II. Core Pain Points in the Operation of Chip Cleanrooms
1.High risk of contamination brought by personnel: Personnel are the largest source of contamination in Chip Cleanrooms. Dust and fine particles attached to clothing are easily brought into the production area with entry and exit, and long-term accumulation affects the cleanliness level of the Chip Cleanroom.
2.Loose access authority management: Ordinary access control is simple, making it easy for irrelevant personnel to enter the Chip Cleanroom. Non-standard manual operations are difficult to meet the compliance traceability and refined management requirements of high-end manufacturing plants.
3.Insufficient equipment adaptability: Surfaces of ordinary materials are prone to residual stains, fingerprints and dust, which are likely to cause secondary pollution and cannot meet the high-frequency cleaning, corrosion resistance and low volatility requirements of Chip Cleanrooms.
4.Cross-contamination caused by manual operations: Manual door opening and button operation increase the probability of contact contamination. Traditional air shower equipment has a single function, incomplete dust removal coverage and limited purification effect.
To address the management pain points of Chip Cleanrooms, the face recognition air shower system is adopted as the only purification gateway for personnel entry and exit, forming a complete closed-loop management solution to reduce pollution risks from the source, which is suitable for high-standard production needs:
1.Full 304 Fingerprint-Free Stainless Steel Body: The whole machine is made of 304 stainless steel with fingerprint-free surface treatment, which is corrosion-resistant, not easy to accumulate dust, easy to clean, free of harmful substance volatilization, and avoids secondary pollution, adapting to the closed production environment of Chip Cleanrooms.
2.Inductive Intelligent Sliding Door Design: Fully automatic inductive door opening and closing, no hand contact throughout the process, reducing dust adhesion and cross-contamination caused by manual contact, running quietly and stably, and adapting to the 24-hour continuous operation mode of chip workshops.
3.Full-Range Rotating Nozzles + Automatic Air Shower Purification: The equipment automatically triggers the air shower process, and multi-angle rotatable nozzles achieve full-coverage dust removal, effectively removing dust, fibers and fine particles on the surface of work clothes, and cutting off personnel-carried pollution from the source.
4.OLED Intelligent Touch Screen + Authority Lock Management: High-definition touch screen for visual adjustment of air shower time and wind speed parameters, with password lock screen function to prevent random parameter changes, ensuring the standardization of the clean purification process.
5.Face and Fingerprint Dual-In-One Intelligent Access Control: Integrating face recognition and fingerprint dual verification, it strictly restricts the access authority of the Chip Cleanroom, automatically retains access records, meets the compliance traceability and refined management needs of high-end manufacturing enterprises, and prevents unauthorized personnel from entering.
